SEOUL, Korea – February 19, 2025 – Park Techniques, a worldwide chief in atomic drive microscopy (AFM), has unveiled an expanded FX Massive Pattern AFM collection at SEMICON Korea 2025. Constructing on the success of Park FX200, which debuted at SEMICON West 2024 and has since gained sturdy market traction in Germany, Japan, and Korea, Park Techniques introduces Park FX300 for 300 mm wafer evaluation, alongside Park FX200 IR and FX300 IR, which combine infrared (IR) spectroscopy, pushing the boundaries of large-sample AFM expertise.
Picture Credit score: Park Techniques
As 300 mm wafers turn out to be the semiconductor {industry} customary, the Park FX300 is designed for these looking for high-precision evaluation with out the complexity of a completely automated inline system. It additionally serves as a great answer for firms contemplating AFM implementation earlier than transitioning to inline fabrication.
Optimized for each industrial and analysis functions, the Park FX300 is anticipated to be a game-changer, delivering superior capabilities for evaluation and high quality management throughout a variety of AFM methods. It’s outfitted with specialised options equivalent to a Sliding Stage for long-range flatness measurements of copper pads in semiconductor post-processing, a Rotation Stage for exact pattern alignment in wafer-level packaging, and an Off-Axis Optics system for enhanced pattern visualization. Moreover, its Fan Filter Unit (FFU) ensures a managed, contamination-free setting, making it supreme for cleanroom functions.
Park Techniques has additionally launched FX200 IR and FX300 IR, increasing its AFM expertise into the realm of nanoscale chemical evaluation. By integrating Fourier Rework Infrared Spectroscopy (FTIR) with AFM, these fashions make the most of Photograph-induced Pressure Microscopy (PiFM) to allow chemical identification with a spatial decision lower than 5 nm. This breakthrough permits researchers and engineers to research the chemical composition of nanoscale constructions with out damaging wafer surfaces, opening new potentialities for materials characterization in semiconductor, polymer, and life science functions.
Designed for samples starting from small sizes to 200 mm or 300 mm wafers, the FX200 IR and FX300 IR allow high-resolution infrared spectral imaging, offering unprecedented insights into materials composition and molecular interactions. With its means to seize chemical bonding data at an ultra-fine scale, it enhances semiconductor defect evaluation, polymer analysis, and superior materials characterization with unmatched precision.
Picture Credit score: Park Techniques
Rooted in Park Techniques’ philosophy of maximizing effectivity whereas minimizing guide intervention, the FX Massive Pattern AFM collection enhances usability with automated probe recognition and trade, a QR code system for probe standing monitoring, and AI-driven laser alignment for seamless operation. The StepScan™ perform additional boosts effectivity by enabling automated sequential measurements at predefined coordinates, permitting researchers to research topography, electrical, mechanical and magnetic properties with minimal guide intervention. Particularly in IR functions, the place laser alignment is commonly a major problem, the methods totally automates the method, making high-resolution chemical evaluation extra accessible than ever earlier than.
Dr. Sang-Joon Cho, Govt Vice President of Park Techniques, emphasised the corporate’s dedication to technological management: “Embodying Park Systems’ decades of expertise and innovation in precision measurement and automation, we have optimized the FX Large Sample AFM series for wafer analysis at the highest level for both industrial and research fields. Park FX300 and the nano-IR systems are redefining the boundaries between industrial and research AFM applications, empowering our customers with the most advanced AFM available—shaping the future of nanoscience together.”
With its newest improvements, Park Techniques continues to solidify its place as a worldwide chief in atomic drive microscopy, offering industry-leading options for the ever-evolving calls for of semiconductor and nanoscience analysis.
About Park Techniques Corp. (KOSDAQ: 140860)
A pioneer and chief in nanometrology options with its manufacture of the very best high quality atomic drive microscopes (AFM), Park Techniques Corp. has additional distinguished itself from {industry} rivals via its unparalleled dedication to cultivating and nurturing legacy skilled relationships with researchers and engineers of all scientific fields and throughout numerous disciplines together with supplies science, physics, chemistry, life sciences, semiconductors, and information storage. The corporate’s mission is to drive nanoscale improvements for scientists and engineers and advance scientific discoveries. Park Techniques’ purchasers embrace high semiconductor firms and analysis universities worldwide. With headquarters in Suwon, Korea, and regional workplaces throughout the Americas, Europe, and Asia, Park Techniques is publicly traded on the Korea Inventory Alternate (KOSDAQ). Study extra at www.parksystems.com.
